Approaches for the RCWA-based non-destructive characterization of subwavelength-structured gratings

نویسندگان

چکیده

Nano-structuring enables us to add additional degrees of freedom the design optical elements. Especially possibility controlling polarization is great interest in field nano-structured optics. For being able exploit whole range form-birefringent phase shifts, aspect ratios resulting element are typically much higher than conventional diffractive elements (DOEs), which does not only pose a challenge on fabrication but also characterization. We evaluate several well-established approaches for nondestructive characterization, including Müller-Matrix-Ellipsometry, measurement diffraction efficiencies, scattering measurements and calibration with rigorous coupled-wave modelling. The goal understand challenges all these techniques combine them reliable method structural reconnaisance high ratio nanostructures.

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ژورنال

عنوان ژورنال: Epj Web of Conferences

سال: 2022

ISSN: ['2101-6275', '2100-014X']

DOI: https://doi.org/10.1051/epjconf/202226605012